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Three Dimensional Simulation for Inductively Coupled Plasma Reactor Employing Multi-Spiral Coil
IKEDA, Kei, OKUMURA, Tomohiro, KOLOBOV, VladimirVolume:
50
Year:
2007
Journal:
Shinku
DOI:
10.3131/jvsj.50.424
File:
PDF, 728 KB
2007