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A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes
Bhaswara, Adhitya, Keum, Hohyun, Mathieu, Fabrice, Legrand, Bernard, Kim, Seok, Nicu, Liviu, Leïchlé, ThierryVolume:
2
Language:
english
Journal:
Frontiers in Mechanical Engineering
DOI:
10.3389/fmech.2016.00001
Date:
March, 2016
File:
PDF, 2.65 MB
english, 2016