Design and control of flexure based XYϑZstage

Journal of Mechanical Science and Technology 2005 / 11 Vol. 19; Iss. 11

Design and control of flexure based XYϑZstage

Dongwoo Kang, Kihyun Kim, Youngman Choi, Daegab Gweon, Sukwon Lee, Moongoo Lee
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Volume:
19
Pages:
8
DOI:
10.1007/bf02916513
Date:
November, 2005
File:
PDF, 459 KB
2005
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