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[AIP The 2000 international conference on characterization and metrology for ULSI technology - Gaithersburg, Maryland (USA) (26-29 June 2000)] AIP Conference Proceedings - Investigation and control of spatial characteristics of chamber-cleaning plasmas
Steffens, Kristen L.Volume:
550
Year:
2001
Language:
english
DOI:
10.1063/1.1354403
File:
PDF, 8.35 MB
english, 2001