[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology - Spatial uniformity in chamber-cleaning plasmas measured using planar laser-induced fluorescence
Steffens, Kristen L., Sobolewski, Mark A.Year:
1998
Language:
english
DOI:
10.1063/1.56831
File:
PDF, 449 KB
english, 1998