Structural and electrical properties of reactive magnetron...

Chinese Physics B 2018 / 04 Vol. 27; Iss. 4

Structural and electrical properties of reactive magnetron sputtered yttrium-doped HfO 2 films

Zhang, Yu, Xu, Jun, Zhou, Da-Yu, Wang, Hang-Hang, Lu, Wen-Qi, Choi, Chi-Kyu
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Volume:
27
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/27/4/048103
Date:
April, 2018
File:
PDF, 961 KB
english, 2018
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