Characterization and Modification of Adhesion in Dry and Wet Environments in Thin-Film Parylene Systems
Ortigoza-Diaz, Jessica, Scholten, Kee, Meng, EllisYear:
2018
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2018.2854636
File:
PDF, 2.98 MB
english, 2018