Characterization and Modification of Adhesion in Dry and...

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Characterization and Modification of Adhesion in Dry and Wet Environments in Thin-Film Parylene Systems

Ortigoza-Diaz, Jessica, Scholten, Kee, Meng, Ellis
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Year:
2018
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2018.2854636
File:
PDF, 2.98 MB
english, 2018
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