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Preparation of SnO2 Thin Films by DC Magnetron Sputtering
Kamimura, Kiichi, Ito, Hironobu, Ito, Shin, Tahara, NorioVolume:
116
Year:
1996
Journal:
IEEJ Transactions on Fundamentals and Materials
DOI:
10.1541/ieejfms1990.116.4_334
File:
PDF, 980 KB
1996