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Si/SiGe Nanostructures Fabricated by Atomic Force Microscopy Oxidation
Bo, Xiang-Zheng, Rokhinson, Leonid P., Yin, Haizhou, Tsui, D. C., Sturm, J. C.Volume:
686
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-686-A6.5
Date:
January, 2001
File:
PDF, 286 KB
english, 2001