A CMOS MEMS Humidity Sensor Enhanced by a Capacitive...

Micromachines 2016 / 04 Vol. 7; Iss. 5

A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure

Huang, Jian-Qiu, Li, Baoye, Chen, Wenhao
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Volume:
7
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi7050074
Date:
April, 2016
File:
PDF, 3.52 MB
english, 2016
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