Stability of flexible composite stamps with thermal nanoimprint
Papenheim, Marc, Eidemüller, Wolfgang, Steinberg, Christian, Mayer, Andre, Götz, Johannes, Nees, Dieter, Scheer, Hella-ChristinVolume:
124
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-018-1990-x
Date:
August, 2018
File:
PDF, 1.38 MB
english, 2018