Deposition of Cr films by hot target magnetron sputtering...

Surface and Coatings Technology 2018 / 09 Vol. 350

Deposition of Cr films by hot target magnetron sputtering on biased substrates

Sidelev, Dmitrii V., Bestetti, Massimiliano, Bleykher, Galina A., Krivobokov, Valery P., Grudinin, Vladislav A., Franz, Silvia, Vicenzo, Antonello, Shanenkova, Yuliya L.
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Volume:
350
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.07.047
Date:
September, 2018
File:
PDF, 1.96 MB
english, 2018
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