High-temperature high-sensitivity AlN-on-SOI Lamb wave...

AIP Advances 2018 / 06 Vol. 8; Iss. 6

High-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor

Dou, Shaoxu, Qi, Mengke, Chen, Cong, Zhou, Hong, Wang, Yong, Shang, Zhengguo, Yang, Jing, Wang, Dengpan, Mu, Xiaojing
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Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5037721
Date:
June, 2018
File:
PDF, 1.80 MB
english, 2018
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