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Various vibration modes in a silicon ring resonator driven by p–n diode actuators formed in the lateral direction
Tsushima, Takafumi, Asahi, Yoichi, Tanigawa, Hiroshi, Furutsuka, Takashi, Suzuki, KenichiroVolume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.067201
Date:
June, 2018
File:
PDF, 4.06 MB
english, 2018