Impact of the precursor chemistry and process conditions on...

Scientific Reports 2018 / 12 Vol. 8; Iss. 1

Impact of the precursor chemistry and process conditions on the cell-to-cell variability in 1T-1R based HfO2 RRAM devices

Grossi, Alessandro, Perez, Eduardo, Zambelli, Cristian, Olivo, Piero, Miranda, Enrique, Roelofs, Robin, Woodruff, Jacob, Raisanen, Petri, Li, Wei, Givens, Michael, Costina, Ioan, Schubert, Markus Andr
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Volume:
8
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-018-29548-7
Date:
December, 2018
File:
PDF, 2.48 MB
english, 2018
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