Anodic Bond Quality and impact on Pressure Sensor Long-Term Stability
Allen, Henry, Ramzan, Kamrul, Knutti, Jim, Ross, Carl, Milliman, Tim, Frye, JeffVolume:
681
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-681-I5.15
Date:
January, 2001
File:
PDF, 208 KB
english, 2001