[IEEE 2018 Baltic URSI Symposium (URSI) - Poznan, Poland (2018.5.15-2018.5.17)] 2018 Baltic URSI Symposium (URSI) - High vacuum in MEMS
Grzebyk, Tomasz, Gorecka-Drzazga, AnnaYear:
2018
Language:
english
DOI:
10.23919/URSI.2018.8406746
File:
PDF, 1.20 MB
english, 2018