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Crystallization of GeSn thin films deposited on Ge(100) substrate by magnetron sputtering
Wang, Yisen, Zhang, Lu, Huang, Zhiwei, Li, Cheng, Chen, Songyan, Huang, Wei, Xu, Jianfang, Wang, JianyuanVolume:
88
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.07.030
Date:
December, 2018
File:
PDF, 1.99 MB
english, 2018