Target heating in sputtering unit of magnetron

Target heating in sputtering unit of magnetron

Kozin, A A
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Volume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012043
Date:
July, 2018
File:
PDF, 732 KB
english, 2018
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