[IEEE 2018 IEEE 68th Electronic Components and Technology Conference (ECTC) - San Diego, CA, USA (2018.5.29-2018.6.1)] 2018 IEEE 68th Electronic Components and Technology Conference (ECTC) - High Throughput and Improved Edge Straightness for Memory Applications Using Stealth Dicing
Suzuki, Natsuki, Ohba, Takayuki, Kondo, Yuta, Sakamoto, Takeshi, Uchiyama, Naoki, Atsumi, KazuhiroYear:
2018
DOI:
10.1109/ECTC.2018.00327
File:
PDF, 1.04 MB
2018