[IEEE 2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) - Prague, Czech Republic (2018.7.2-2018.7.5)] 2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) - A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing
KORABI, Taki Eddine, Graton, Guillaume, El Adel, El Mostafa, Ouladsine, Mustapha, Pinaton, JacquesYear:
2018
DOI:
10.1109/PRIME.2018.8430365
File:
PDF, 1.55 MB
2018