High speed e-beam lithography for gold nanoarray...

Beilstein Journal of Nanotechnology 2014 / 10 Vol. 5

High speed e-beam lithography for gold nanoarray fabrication and use in nanotechnology

Trasobares, Jorge, Vaurette, François, François, Marc, Romijn, Hans, Codron, Jean-Louis, Vuillaume, Dominique, Théron, Didier, Clément, Nicolas
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Volume:
5
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.5.202
Date:
October, 2014
File:
PDF, 5.02 MB
2014
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