[IEEE 2018 International Conference on Development and Application Systems (DAS) - Suceava (2018.5.24-2018.5.26)] 2018 International Conference on Development and Application Systems (DAS) - Practical and low-cost solution for the temperature control of a substrate heater for thin film deposition
Fekete, Albert-Zsombor, Jakab-Farkas, LaszloYear:
2018
Language:
english
DOI:
10.1109/DAAS.2018.8396073
File:
PDF, 1.61 MB
english, 2018