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Online Precise Motion Measurement of 3-DOF Nanopositioners Based on Image Correlation
Li, Hai, Zhang, Xianmin, Zhu, Benliang, Fatikow, SergejYear:
2018
Language:
english
Journal:
IEEE Transactions on Instrumentation and Measurement
DOI:
10.1109/TIM.2018.2853378
File:
PDF, 2.71 MB
english, 2018