SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use
Winterstein, Thomas, Staab, Matthias, Nakic, Christian, Feige, Hans-Jürgen, Vogel, Jürgen, Schlaak, HelmutVolume:
5
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi5041310
Date:
December, 2014
File:
PDF, 4.57 MB
english, 2014