SU-8 Electrothermal Actuators: Optimization of Fabrication...

SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use

Winterstein, Thomas, Staab, Matthias, Nakic, Christian, Feige, Hans-Jürgen, Vogel, Jürgen, Schlaak, Helmut
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Volume:
5
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi5041310
Date:
December, 2014
File:
PDF, 4.57 MB
english, 2014
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