Static and Dynamic Mechanical Behaviors of Electrostatic...

Micromachines 2018 / 01 Vol. 9; Iss. 1

Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

Feng, Jingjing, Liu, Cheng, Zhang, Wei, Hao, Shuying
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Volume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9010034
Date:
January, 2018
File:
PDF, 11.74 MB
english, 2018
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