Investigation of Mg δ-doping for low resistance N-polar...

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Semiconductor Science and Technology 2018 / 07

Investigation of Mg δ-doping for low resistance N-polar p-GaN films grown at reduced temperatures by MOCVD

Lund, Cory, Agarwal, Anchal, Romanczyk, Brian, Mates, Tom, Nakamura, Shuji, DenBaars, Steven P, Mishra, Umesh K, Keller, Stacia
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Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/aad5cf
Date:
July, 2018
File:
PDF, 1.46 MB
english, 2018
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