ICP etched position sensitive silicon sensors on silicon...

Journal of Instrumentation 2018 / 05 Vol. 13; Iss. 5

ICP etched position sensitive silicon sensors on silicon and SOI substrates

Möller, Ch., Röder, R., Klein, Th., Ortlepp, Th.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
13
Language:
english
Journal:
Journal of Instrumentation
DOI:
10.1088/1748-0221/13/05/C05019
Date:
May, 2018
File:
PDF, 1.02 MB
english, 2018
Conversion to is in progress
Conversion to is failed