[IEEE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2018.4.30-2018.5.3)] 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Opportunities, challenges and use cases of digitization within the semiconductor industry
Schneider, Germar, Keil, Sophia, Luhn, GerhardYear:
2018
Language:
english
DOI:
10.1109/ASMC.2018.8373173
File:
PDF, 1015 KB
english, 2018