Thermal Reliability Study of an Electrothermal MEMS Mirror
Wang, Haoran, Zhou, Liang, Zhang, Xiaoyang, Xie, HuikaiYear:
2018
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/TDMR.2018.2860286
File:
PDF, 4.54 MB
english, 2018