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Nanoscale Semiconductor Processes Using STM and AFM Lithographies. The Present and Future of Nano-Lithography Using Scanning Probes. How to Measure the Properties of Nano-Lithographed Structures.
AONO, Masakazu, JIANG, Chun-Sheng, NAKAYAMA, Tomonobu, OKUDA, Taichi, QIAO, Shan, SAKURAI, Makoto, THIRSTRUP, Carsten, WU, Zang-HuaVolume:
19
Year:
1998
Journal:
Hyomen Kagaku
DOI:
10.1380/jsssj.19.698
File:
PDF, 14.69 MB
1998