High-k Dielectrics for Application in Broadband Radio...

IEEJ Transactions on Sensors and Micromachines 2007 Vol. 127; Iss. 12

High-k Dielectrics for Application in Broadband Radio Frequency-Microelectromechanical System Capacitive Shunt Switch

Zhang, Yi, Lu, Jian, Ichiki, Masaaki, Onodera, Kazumasa, Maeda, Ryutaro
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Volume:
127
Year:
2007
Language:
english
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.127.540
File:
PDF, 963 KB
english, 2007
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