Micro Motion Amplifiers for Compact Out-of-Plane Actuation
Xie, Xin, Bigdeli Karimi, Majid, Liu, Sanwei, Myanganbayar, Battushig, Livermore, CarolVolume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9070365
Date:
July, 2018
File:
PDF, 2.81 MB
english, 2018