Structural evolution of molybdenum disulfide prepared by...

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ACS Applied Nano Materials 2018 / 07

Structural evolution of molybdenum disulfide prepared by atomic layer deposition for realization of large scale films in micro-electronic applications

Letourneau, Steven, Young, Matthias J., Bedford, Nicholas M., Ren, Yang, Yanguas-Gil, Angel, Mane, Anil, Elam, Jeffrey W., Graugnard, Elton
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Language:
english
Journal:
ACS Applied Nano Materials
DOI:
10.1021/acsanm.8b00798
Date:
July, 2018
File:
PDF, 1.81 MB
english, 2018
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