Crystalline SrZrO 3 deposition on Ge (001) by atomic layer deposition for high- k dielectric applications
Hu, Shen, Ji, Li, Chen, Pei-Yu, Edmondson, Bryce I., Chang, Heng-Lu, Posadas, Agham, Wu, Hsin Wei, Yu, Edward T., Smith, David J., Demkov, Alexander A., Ekerdt, John G.Volume:
124
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5026790
Date:
July, 2018
File:
PDF, 3.04 MB
english, 2018