DREM2: a facile fabrication strategy for freestanding three...

DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process

Chang, Bingdong, Jensen, Flemming, Hübner, Jörg, Jansen, Henri
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Volume:
28
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aad0c4
Date:
October, 2018
File:
PDF, 2.94 MB
english, 2018
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