Closed-loop laser polishing using in-process surface finish metrology
Faehnle, Oliver, Rascher, Rolf, Vogt, Christian, Kim, Dae WookVolume:
57
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.57.000834
Date:
February, 2018
File:
PDF, 808 KB
english, 2018