AlN based piezoelectric micromirror
Shao, Jian, Li, Qi, Feng, Chuhuan, Li, Wei, Yu, HongbinVolume:
43
Language:
english
Journal:
Optics Letters
DOI:
10.1364/OL.43.000987
Date:
March, 2018
File:
PDF, 1.82 MB
english, 2018