Time-of-flight detection of femtosecond laser pulses for precise measurement of large microelectronic step height
Lu, Xing, Zhang, Shuangyou, Jeon, Chan-Gi, Kang, Chu-Shik, Kim, Jungwon, Shi, KebinVolume:
43
Language:
english
Journal:
Optics Letters
DOI:
10.1364/OL.43.001447
Date:
April, 2018
File:
PDF, 1.63 MB
english, 2018