High aspect ratio titanium nitride trench structures as...

High aspect ratio titanium nitride trench structures as plasmonic biosensor

Shkondin, E., Repän, T., Takayama, O., Lavrinenko, A. V.
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Volume:
7
Language:
english
Journal:
Optical Materials Express
DOI:
10.1364/OME.7.004171
Date:
November, 2017
File:
PDF, 22.29 MB
english, 2017
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