![](/img/cover-not-exists.png)
Analysis of the laser oxidation kinetics process of In-In_2O_3 MTMO photomasks by laser direct writing
Xia, Feng, Zhang, Xinzheng, Wang, Meng, Liu, Qian, Xu, JingjunVolume:
23
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.23.029193
Date:
November, 2015
File:
PDF, 1.87 MB
english, 2015