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Signal modeling in low coherence interference microscopy on example of rectangular grating
Xie, Weichang, Lehmann, Peter, Niehues, Jan, Tereschenko, StanislavVolume:
24
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.24.014283
Date:
June, 2016
File:
PDF, 2.20 MB
english, 2016