EUV scatterometer with a high-harmonic-generation EUV...

Optics Express 2016 / 11 Vol. 24; Iss. 24

EUV scatterometer with a high-harmonic-generation EUV source

Ku, Yi-Sha, Yeh, Chia-Liang, Chen, Yi-Chang, Lo, Chun-Wei, Wang, Wei-Ting, Chen, Ming-Chang
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Volume:
24
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.24.028014
Date:
November, 2016
File:
PDF, 3.60 MB
english, 2016
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