Optimal polarization modulation for orthogonal two-axis Lloyd’s mirror interference lithography
Chen, Xiuguo, Ren, Zongwei, Shimizu, Yuki, Chen, Yuan-liu, Gao, WeiVolume:
25
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.25.022237
Date:
September, 2017
File:
PDF, 4.12 MB
english, 2017