Cross-sectional particle measurement in the resonance...

Optics Express 2017 / 10 Vol. 25; Iss. 21

Cross-sectional particle measurement in the resonance domain on the substrate through scatterometry

Hoshino, Tetsuya, Watanabe, Norio, Aoki, Sadao, Sakurai, Kenji, Itoh, Masahide
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Volume:
25
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.25.026329
Date:
October, 2017
File:
PDF, 5.85 MB
english, 2017
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