![](/img/cover-not-exists.png)
Micro/nanolithography of transparent thin films through laser-induced release of phase-transition latent-heat
Wei, Tao, Zhang, Kui, Wei, Jingsong, Wang, Yang, Zhang, LongVolume:
25
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.25.028146
Date:
November, 2017
File:
PDF, 2.91 MB
english, 2017