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Information theoretical aspects in coherent optical lithography systems
Ma, Xu, Zhang, Hao, Wang, Zhiqiang, Li, Yanqiu, Arce, Gonzalo R., Garcia-Frias, Javier, Zhang, LuVolume:
25
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.25.029043
Date:
November, 2017
File:
PDF, 3.28 MB
english, 2017