Direct laser writing for micro-optical devices using a...

Optics Express 2017 / 12 Vol. 25; Iss. 25

Direct laser writing for micro-optical devices using a negative photoresist

Tsutsumi, Naoto, Hirota, Junichi, Kinashi, Kenji, Sakai, Wataru
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Volume:
25
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.25.031539
Date:
December, 2017
File:
PDF, 4.59 MB
english, 2017
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