Instantaneous one-angle white-light scatterometer
Amra, Claude, Zerrad, Myriam, Liukaityte, Simona, Lequime, MichelVolume:
26
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.26.000204
Date:
January, 2018
File:
PDF, 2.91 MB
english, 2018