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InGaN/GaN micro mirror with electrostatic comb drive actuation integrated on a patterned silicon-on-insulator wafer
Zhang, Wei, Li, Pei, Zhang, Xuehua, Wang, Yongjin, Hu, FangrenVolume:
26
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.26.007672
Date:
March, 2018
File:
PDF, 2.85 MB
english, 2018